SAW RESONATORS ON SILICON WITH ZNO LIMITED TO IDT REGIONS

被引：0
|
作者：
SCHWARTZ, SS [1 ]
MARTIN, SJ [1 ]
GUNSHOR, RL [1 ]
DATTA, S [1 ]
PIERRET, RF [1 ]
机构：
[1] PURDUE UNIV,SCH ELECT ENGN,W LAFAYETTE,IN 47907
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1985年 / 32卷 / 01期
关键词：
D O I：
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中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
引用
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页码：86 / 86
页数：1
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