SELECTIVE PLASMA-ETCHING OF POLYSILICON

被引：0

作者：

CHANG, PC

HSIA, S

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来源：

SOLID STATE TECHNOLOGY | 1984年 / 27卷 / 04期

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：225 / 228

页数：4

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