EPITAXIAL-GROWTH OF ZNO FILMS BY VAPOR TRANSPORT IN AN OPEN TUBE SYSTEM

被引：34

作者：

KASUGA, M ^{[1
]}

ISHIHARA, S ^{[1
]}

机构：

[1] YAMANASHI UNIV,FAC ENGN,DEPT ELECTR,KOFU,YAMANASHI 400,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1976年 / 15卷 / 09期

关键词：

D O I：

10.1143/JJAP.15.1835

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1835 / 1836

页数：2

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[1] A NEW METHOD FOR EPITAXIAL GROWTH OF SILICON AND ITS THERMODYNAMICAL ANALYSIS
ARIZUMI, T
NISHINAGA, T
KASUGA, M
OGAWA, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1969, 8 (01) : 32 - +
[2] PREPARATION OF ZNO THIN-FILM TRANSDUCERS BY VAPOR TRANSPORT
BELT, RF
FLORIO, GC
[J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (11) : 5215 - &
[3] EPITAXIAL ZNO ON SAPPHIRE
GALLI, G
COKER, JE
[J]. APPLIED PHYSICS LETTERS, 1970, 16 (11) : 439 - &
[4] FAST ELECTROOPTIC WAVEGUIDE DEFLECTOR MODULATOR
HAMMER, JM
CHANNIN, DJ
DUFFY, MT
[J]. APPLIED PHYSICS LETTERS, 1973, 23 (04) : 176 - 177
[5] LOW-LOSS EPITAXIAL ZNO OPTICAL WAVEGUIDES
HAMMER, JM
WITTKE, JP
DUFFY, MT
CHANNIN, DJ
[J]. APPLIED PHYSICS LETTERS, 1972, 21 (08) : 358 - &
[6] THERMODYNAMIC ANALYSIS OF OPEN-TUBE CHEMICAL VAPOR TRANSPORT OF ZNO USING ZN-H2O REACTION
REISMAN, A
LANDSTEIN, JE
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (09) : 1479 - +