ANNEALING OF PLASMA SILICON OXYNITRIDE FILMS

被引：80

作者：

DENISSE, CMM ^{[1
]}

TROOST, KZ ^{[1
]}

HABRAKEN, FHPM ^{[1
]}

VANDERWEG, WF ^{[1
]}

HENDRIKS, M ^{[1
]}

机构：

[1] ADV SEMICOND MAT EUROPE BV,3723 BS BILTHOVEN,NETHERLANDS

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 07期

关键词：

D O I：

10.1063/1.337118

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2543 / 2547

页数：5

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