Z CALIBRATION OF THE ATOMIC-FORCE MICROSCOPE BY MEANS OF A PYRAMIDAL TIP

被引：19
|
作者：
JENSEN, F
机构：
[1] Mikroelektronik Centeret, DTH, Building 345e
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 09期
关键词：
D O I：
10.1063/1.1143873
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new method for imaging the probe tip of an atomic force microscope cantilever by the atomic force microscope itself (self-imaging) is presented. The self-imaging is accomplished by scanning the probe tip across a sharper tip on the surface. By using a pyramidal probe tip with a very well-defined aspect ratio, this technique provides an excellent z-calibration standard for the atomic force microscope.
引用
收藏
页码：2595 / 2597
页数：3
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