POLYIMIDES AS INTERLAYER DIELECTRICS FOR HIGH-PERFORMANCE INTERCONNECTIONS OF INTEGRATED-CIRCUITS

被引：0
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作者：
JENSEN, RJ
机构：
来源：
ACS SYMPOSIUM SERIES | 1987年 / 346卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：466 / 483
页数：18
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