NATURE OF OXYGEN DONOR IN CZOCHRALSKI-GROWN SILICON

被引：6

|

作者：

FUKUOKA, N

YONETA, M

MIYAMURA, R

SAITO, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 02期

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D O I：

10.1143/JJAP.26.197

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：197 / 201

页数：5

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