VIBRATION ANALYSIS OF MICROMECHANICAL ELEMENTS

被引：19

作者：

HOK, B ^{[1
]}

GUSTAFSSON, K ^{[1
]}

机构：

[1] UNIV UPPSALA,INST TECHNOL,DEPT ELECTR,S-75121 UPPSALA,SWEDEN

来源：

SENSORS AND ACTUATORS | 1985年 / 8卷 / 03期

关键词：

D O I：

10.1016/0250-6874(85)85006-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：235 / 243

页数：9

共 21 条

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[3] CSEPREGI L, 1984, T84209 FRAUNH I FEST
[4] DENHARTOG JP, 1934, MECH VIBRATIONS, P172
[5] Hok B., 1983, Sensors and Actuators, V4, P341, DOI 10.1016/0250-6874(83)85042-2
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