VIBRATION ANALYSIS OF MICROMECHANICAL ELEMENTS

被引：19

作者：

HOK, B ^{[1
]}

GUSTAFSSON, K ^{[1
]}

机构：

[1] UNIV UPPSALA,INST TECHNOL,DEPT ELECTR,S-75121 UPPSALA,SWEDEN

来源：

SENSORS AND ACTUATORS | 1985年 / 8卷 / 03期

关键词：

D O I：

10.1016/0250-6874(85)85006-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：235 / 243

页数：9

共 21 条

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[3]

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[4]

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[5]

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[8] FERROELECTRIC POLYMERS [J].

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[9] THE SURFACE-ENERGY OF SI, GAAS, AND GAP [J].

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[10] MINIATURIZATION OF TUNING FORKS [J].

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