CATHODOLUMINESCENCE STUDY OF A SILICON DIOXIDE LAYER ON SILICON WITH AID OF AUGER-ELECTRON SPECTROSCOPY

被引：18

作者：

KOYAMA, H

MATSUBARA, K

MOURI, M

机构：

[1] COMP DEV LABS LTD, ITAMI, HYOGO 664, JAPAN

[2] KYOTO UNIV, FAC ENGN, SAKYO KU, KYOTO 606, JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 12期

关键词：

D O I：

10.1063/1.323546

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5380 / 5381

页数：2

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