CATHODOLUMINESCENCE STUDY OF A SILICON DIOXIDE LAYER ON SILICON WITH AID OF AUGER-ELECTRON SPECTROSCOPY

被引：18
|
作者：
KOYAMA, H
MATSUBARA, K
MOURI, M
机构：
[1] COMP DEV LABS LTD, ITAMI, HYOGO 664, JAPAN
[2] KYOTO UNIV, FAC ENGN, SAKYO KU, KYOTO 606, JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 12期
关键词：
D O I：
10.1063/1.323546
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：5380 / 5381
页数：2
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