DIRECT SUBMICRON TOPOGRAPHY IN THE RASTER ELECTRON-MICROSCOPE

被引：0
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作者：
BEZRUKOV, AV
GEIM, AK
DUBONOS, SV
PETRASHOV, VT
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PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1987年 / 13卷 / 16期
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O59 [应用物理学];
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页码：971 / 974
页数：4
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