DIRECT SUBMICRON TOPOGRAPHY IN THE RASTER ELECTRON-MICROSCOPE

被引：0

作者：

BEZRUKOV, AV

GEIM, AK

DUBONOS, SV

PETRASHOV, VT

机构：

来源：

PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1987年 / 13卷 / 16期

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中图分类号：

O59 [应用物理学];

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摘要：

引用

页码：971 / 974

页数：4

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[1] RASTER OPTICAL MICROSCOPE ATTACHMENT TO A RASTER ELECTRON-MICROSCOPE
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[2] SCINTILLATION COLLECTOR OF RASTER ELECTRON-MICROSCOPE
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[3] STEREO MEASUREMENTS IN A RASTER ELECTRON-MICROSCOPE
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[4] ANALYSIS OF IMAGES IN RASTER ELECTRON-MICROSCOPE
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[5] TEST OBJECT FOR A RASTER ELECTRON-MICROSCOPE
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[6] REPOLARIZATION OF FERROELECTRICS IN RASTER ELECTRON-MICROSCOPE
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[7] SUBMICRON CRYSTALLOGRAPHY IN THE SCANNING ELECTRON-MICROSCOPE
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[9] EVALUATION OF PRINTING QUALITIES BY MEANS OF A RASTER ELECTRON-MICROSCOPE
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[10] RASTER SCANNING ELECTRON-MICROSCOPE FOR MINUTE SEMICONDUCTOR STRUCTURES
不详
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