ATTACHMENT OF OPTOELECTRONIC COMPONENTS TO SILICON SUBMOUNTS BY ND-YAG LASER SOLDERING OF INDIUM

被引：1
|
作者：
BUSTA, HH
MIKA, LJ
MEDEMA, KE
MITCHELL, MA
机构：
[1] Amoco Technology Company, Amow Research Center, Napewille, IL, 60563
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1994年 / 4卷 / 03期
关键词：
D O I：
10.1088/0960-1317/4/3/003
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fluxless soldering technique has been developed for the attachment of optoelectronic components to silicon submounts by laser soldering of gold-coated indium solder pads. By keeping the solder time per pad at 60 msec, and by adhering to a solder schedule that minimizes the formation of indium oxide, it is possible to solder without flux or the need of an inert atmosphere. The method is demonstrated on a high speed data link consisting of a laser, an external modulator, and a laser back facet detector attached to a silicon submount.
引用
收藏
页码：110 / 115
页数：6
相关论文
共 50 条
  • [1] ND-YAG LASER ANNEALING OF SILICON ON SAPPHIRE
    AFFOLTER, K
    LUTHY, W
    ROULET, ME
    SCHWOB, P
    FALLAVIER, M
    THOMAS, JP
    MACKOWSKI, JM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (08) : C364 - C364
  • [2] Experimental Micromachining of Silicon with Nd-YAG Laser
    Mon, Thet T.
    Muhammad, Khairul F.
    Ahmad, Asnul H.
    Mohid, Zazuli
    EXPERIMENTAL MECHANICS AND MATERIALS, 2011, 83 : 244 - +
  • [3] RECRYSTALLIZATION OF SILICON FILMS ON SAPPHIRE WITH AN ND-YAG LASER
    AFFOLTER, K
    LUTHY, W
    ROULET, ME
    HELVETICA PHYSICA ACTA, 1980, 53 (02): : 278 - 278
  • [4] ND-YAG LASER
    VUCICEVIC, ZM
    WEBB, R
    TRANSACTIONS AMERICAN ACADEMY OF OPHTHALMOLOGY AND OTOLARYNGOLOGY, 1976, 81 (05): : 945 - 946
  • [5] DYNAMICS OF ND-YAG LASER ANNEALING OF SILICON ON SAPPHIRE
    LUTHY, W
    AFFOLTER, K
    WEBER, HP
    ROULET, ME
    FALLAVIER, M
    THOMAS, JP
    MACKOWSKI, J
    APPLIED PHYSICS LETTERS, 1979, 35 (11) : 873 - 875
  • [6] ND-YAG LASER PHOTOCOAGULATION
    MCCRAY, RS
    WINKLER, WP
    NEW YORK STATE JOURNAL OF MEDICINE, 1985, 85 (02) : 59 - 59
  • [7] ND-YAG LASER IN DERMATOLOGY
    LANDTHALER, M
    BRUNNER, R
    HAINA, D
    FRANK, F
    WAIDELICH, W
    BRAUNFALCO, O
    MUNCHENER MEDIZINISCHE WOCHENSCHRIFT, 1984, 126 (39): : 1108 - 1112
  • [8] ND-YAG LASER ANNEALING OF GALLIUM-IMPLANTED SILICON
    TAKAI, M
    TSOU, SC
    TSIEN, PH
    ROSCHENTHALER, D
    RYSSEL, H
    APPLIED PHYSICS, 1981, 24 (04): : 319 - 322
  • [9] ND-YAG LASER ENDOSCOPY
    KOJIMA, E
    YANAGIBORI, A
    YUDA, K
    HIRAKAWA, S
    JOURNAL OF REPRODUCTIVE MEDICINE, 1988, 33 (11) : 907 - 911
  • [10] IRIDOTOMY WITH THE ND-YAG LASER
    ROBERT, Y
    MEIER, U
    KLINISCHE MONATSBLATTER FUR AUGENHEILKUNDE, 1984, 184 (05) : 403 - 405
12345