ELECTRODE STRUCTURE EFFECT ON THE SELECTIVITY OF GAS SENSORS

被引：9
作者：
FILIPPOV, VI
TERENTJEV, AA
YAKIMOV, SS
机构：
[1] Russian Scientific Center 'Kurchatov Institute', Institute of Molecular Physics
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 28卷 / 01期
关键词：
ELECTRODE STRUCTURE; GAS SENSORS; SENSITIVITY;
D O I：
10.1016/0925-4005(94)01534-O
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The effect of the catalytic metal gate structure on the selectivity of MOS gas sensors has been described. It has been shown that hydrogen cyclic treatment (HCT) modifies the structure of the palladium film evaporated on the silicon dioxide. Pore formation in the gate gives rise to the ammonia and carbon monoxide sensitivity of the field-effect sensor. Ammonia adsorption and desorption processes on the sensor surface have been investigated. These processes are of a unimolecular nature with an adsorption activation energy of 0.08+/-0.02 eV/molecule in an inert atmosphere.
引用
收藏
页码：55 / 58
页数：4
相关论文
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