INVESTIGATION OF THE PHYSICAL MODELING OF THE GATE-DEPLETION EFFECT

被引:23
作者
HABAS, P [1 ]
FARICELLI, JV [1 ]
机构
[1] DIGITAL EQUIPMENT CORP,HUDSON,MA 01749
关键词
D O I
10.1109/16.137331
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The physical modeling of the gate for the analysis of the gate-depletion effect is investigated. The accuracy of the assumed rigid-parabolic-band model is examined by comparing the numerical simulation with the experimental C-V data. Disagreement between calculation and measurement is observed and several physical phenomena which may be responsible for it are proposed. An engineering approach to remove the disagreement is given. The presented investigations may be of general interest for modeling of heavily doped space-charge regions.
引用
收藏
页码:1496 / 1500
页数:5
相关论文
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