PLASMA-ASSISTED EPITAXIAL-GROWTH OF GASB IN HYDROGEN PLASMA

被引：12
|
作者：
SATO, Y
MATSUSHITA, K
HARIU, T
SHIBATA, Y
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 06期
关键词：
D O I：
10.1063/1.94837
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：592 / 594
页数：3
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