FE2O3 - INORGANIC ELECTRON RESIST MATERIAL

被引：11

作者：

KAMMLOTT, GW ^{[1
]}

SINCLAIR, WR ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 07期

关键词：

D O I：

10.1149/1.2401955

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：929 / 932

页数：4

相关论文

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[9] MATERIALS FOR USE IN A DURABLE SELECTIVELY SEMITRANSPARENT PHOTOMASK
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