The design and test of MEMS piezoresistive ultrasonic sensor arrays

被引：1

作者：

Lian Deqin ^{[1
,2
]}

He Changde ^{[1
,2
]}

Zhang Hui ^{[1
]}

Yu Jiaqi ^{[1
]}

Yuan Kejing ^{[2
]}

Xue Chenyang ^{[1
,2
]}

机构：

[1] North Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Shanxi, Peoples R China

[2] North Univ China, Key Lab Sci & Technol Elect Test & Measurement, Taiyuan 030051, Shanxi, Peoples R China

来源：

JOURNAL OF SEMICONDUCTORS | 2013年 / 34卷 / 03期

基金：

中国国家自然科学基金;

关键词：

ultrasonic sensor; piezoresistive; integrated array; multi-target identification;

D O I：

10.1088/1674-4926/34/3/034007

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The design, fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced. The consistency of the resonance frequency and the sensitivity of the array are tested. Moreover, we detect the directivity and the multi-target identification ability of the array. The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results. This paper analyzes this problem in detail and points out the direction of improvement. As for the directivity, the actual result is consistent with the theoretical one. The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72 degrees when the distance between the sensor array and measured objects is 2 m.

引用

页数：7

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