IODINE ION MILLING OF INDIUM-CONTAINING COMPOUND SEMICONDUCTORS

被引：61
作者：
CHEW, NG
CULLIS, AG
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 01期
关键词：
D O I：
10.1063/1.94582
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：142 / 144
页数：3
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