IODINE ION MILLING OF INDIUM-CONTAINING COMPOUND SEMICONDUCTORS

[1] SURFACE-COMPOSITION AND ETCHING OF III-V SEMICONDUCTORS IN CL-2 ION-BEAMS [J]. APPLIED PHYSICS LETTERS, 1982, 40 (07) : 583 - 586

[2] HYDROGEN PLASMA-ETCHING OF SEMICONDUCTORS AND THEIR OXIDES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (01): : 45 - 50

[3] Chew N.G., 1983, I PHYS C SER, V68, P437

[4] CHEW NG, 1983, Patent No. 8319716

[5] STUDY OF THE STRUCTURE AND PROPERTIES OF EPITAXIAL SILVER DEPOSITED BY ATOMIC-BEAM TECHNIQUES ON (001) INP [J]. THIN SOLID FILMS, 1979, 58 (01) : 197 - 202

[6] INTERACTION OF CHLORINE WITH INDIUM-PHOSPHIDE SURFACES [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1978, 11 (10): : 1989 - 2000

[7] PETTIT HR, 1971, I PHYS C SER, V10, P290

[1] SURFACE-COMPOSITION AND ETCHING OF III-V SEMICONDUCTORS IN CL-2 ION-BEAMS [J]. APPLIED PHYSICS LETTERS, 1982, 40 (07) : 583 - 586

[2] HYDROGEN PLASMA-ETCHING OF SEMICONDUCTORS AND THEIR OXIDES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (01): : 45 - 50

[3] Chew N.G., 1983, I PHYS C SER, V68, P437

[4] CHEW NG, 1983, Patent No. 8319716

[5] STUDY OF THE STRUCTURE AND PROPERTIES OF EPITAXIAL SILVER DEPOSITED BY ATOMIC-BEAM TECHNIQUES ON (001) INP [J]. THIN SOLID FILMS, 1979, 58 (01) : 197 - 202

[6] INTERACTION OF CHLORINE WITH INDIUM-PHOSPHIDE SURFACES [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1978, 11 (10): : 1989 - 2000

[7] PETTIT HR, 1971, I PHYS C SER, V10, P290