THEORY OF GETTER PUMP EVALUATION - STICKING COEFFICIENTS OF COMMON GASES ON CONTINUOUSLY DEPOSITED GETTER FILMS

被引：8

作者：

GRIGOROV, GI

TZATZOV, KK

机构：

来源：

关键词：

D O I：

10.1016/0042-207X(83)90003-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：139 / 148

页数：10

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