A CAPACITIVE HUMIDITY SENSOR BASED ON CMOS TECHNOLOGY WITH ADSORBING FILM

被引：20

作者：

PARAMESWARAN, M

BALTES, HP

BRETT, MJ

FRASER, DE

ROBINSON, AM

机构：

[1] UNIV ALBERTA,ALBERTA MICROELECTR CTR,EDMONTON T6G 2G7,ALBERTA,CANADA

[2] SWISS FED INST TECHNOL,INST QUANTUM ELECTR,CH-8093 ZURICH,SWITZERLAND

来源：

SENSORS AND ACTUATORS | 1988年 / 15卷 / 04期

关键词：

We gratefully acknowledge the services of the Canadian Microelectronic Corporation (CMC) in arranging the chip fabrication. We are also grateful for the facilities offered by the Physical Plant; University of Alberta; to test the sensors. This work has been supported by the Natural Science and Engineering Research Council of Canada (NSERC);

D O I：

10.1016/0250-6874(88)81503-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：325 / 335

页数：11

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