TEMPERATURE AND COMPOSITION DEPENDENCE OF THE HIGH-FLUX PLASMA SPUTTERING YIELD OF CU-LI BINARY-ALLOYS

被引：6
|
作者：
KRAUSS, AR
MENDELSOHN, MH
GRUEN, DM
CONN, RW
GOEBEL, DM
HIROOKA, Y
LEUNG, WK
BOHDANSKY, J
机构：
[1] UNIV CALIF LOS ANGELES,DEPT NUCL ENGN,LOS ANGELES,CA 90024
[2] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 23卷 / 04期
关键词：
D O I：
10.1016/0168-583X(87)90478-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：511 / 517
页数：7
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