HIGH-PRESSURE THERMAL-OXIDATION OF INP IN STEAM

被引：20

作者：

GANN, RG ^{[1
]}

GEIB, KM ^{[1
]}

WILMSEN, CW ^{[1
]}

COSTELLO, J ^{[1
]}

HRYCHOWAIN, G ^{[1
]}

ZETO, RJ ^{[1
]}

机构：

[1] USA,ELECTR TECHNOL & DEVICES LAB,FT MONMOUTH,NJ 07703

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 02期

关键词：

D O I：

10.1063/1.340271

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：506 / 509

页数：4

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[2]

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[7] THERMAL-OXIDATION OF INP [J].

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[8] HIGH-PRESSURE THERMAL OXIDE INP INTERFACE [J].

WILMSEN, CW ;

GEIB, KM ;

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