共 19 条
[7]
ENERGY-DISTRIBUTIONS OF SPUTTERED COPPER NEUTRALS AND IONS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1978, 15 (02)
:684-687
[8]
SECONDARY-ION EMISSION PROBABILITY IN SPUTTERING
[J].
PHYSICAL REVIEW B,
1979, 19 (11)
:5661-5665
[9]
THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS
[J].
PHYSICAL REVIEW,
1969, 184 (02)
:383-+