DIFFUSION OF DONOR ELEMENTS (SB-125, P-32, AS-74(73)) IN POLYCRYSTALLINE SILICON

[1] GRAIN-BOUNDARY DIFFUSION IN POLYCRYSTALLINE SILICON FILMS ON SIO2 [J]. JOURNAL DE PHYSIQUE, 1982, 43 (NC1): : 363 - 368

[2] Baumgart H., 1982, Grain Boundaries in Semiconductors. Proceedings of the Materials Research Society Annual Meeting, P311

[3] DIFFUSION CHARACTERISTICS OF BORON AND PHOSPHORUS IN POLYCRYSTALLINE SILICON [J]. THIN SOLID FILMS, 1983, 100 (03) : 235 - 248

[4] CABANE J, 1986, COMMUNICATION FEB

[5] CHARI A, 1980, RAPPORT ATP CONVERSI

[6] DRIMER D, 1960, REP ACAD POPULARE RO, V13, P39

[7] DUDKO GV, 1969, FIZ TVERD TELA+, V11, P1097

[8] DIFFUSION OF DONOR AND ACCEPTOR ELEMENTS IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1956, 27 (05) : 544 - 553

[9] DONOR DIFFUSION DYNAMICS IN SILICON [J]. PHYSICAL REVIEW B-SOLID STATE, 1971, 3 (02): : 397 - +

[10] GHOSTAGORE R, 1970, APPL PHYS LETT, V17, P317

[1] GRAIN-BOUNDARY DIFFUSION IN POLYCRYSTALLINE SILICON FILMS ON SIO2 [J]. JOURNAL DE PHYSIQUE, 1982, 43 (NC1): : 363 - 368

[2] Baumgart H., 1982, Grain Boundaries in Semiconductors. Proceedings of the Materials Research Society Annual Meeting, P311

[3] DIFFUSION CHARACTERISTICS OF BORON AND PHOSPHORUS IN POLYCRYSTALLINE SILICON [J]. THIN SOLID FILMS, 1983, 100 (03) : 235 - 248

[4] CABANE J, 1986, COMMUNICATION FEB

[5] CHARI A, 1980, RAPPORT ATP CONVERSI

[6] DRIMER D, 1960, REP ACAD POPULARE RO, V13, P39

[7] DUDKO GV, 1969, FIZ TVERD TELA+, V11, P1097

[8] DIFFUSION OF DONOR AND ACCEPTOR ELEMENTS IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1956, 27 (05) : 544 - 553

[9] DONOR DIFFUSION DYNAMICS IN SILICON [J]. PHYSICAL REVIEW B-SOLID STATE, 1971, 3 (02): : 397 - +

[10] GHOSTAGORE R, 1970, APPL PHYS LETT, V17, P317