SYSTEMATIC DESIGN OF AN ELECTROSTATIC OPTICAL-SYSTEM FOR ION-BEAM LITHOGRAPHY

被引：20
|
作者：
PAIK, H [1 ]
LEWIS, GN [1 ]
KIRKLAND, EJ [1 ]
SIEGEL, BM [1 ]
机构：
[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期
关键词：
D O I：
10.1116/1.583295
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
24
引用
收藏
页码：75 / 84
页数：10
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