SYSTEMATIC DESIGN OF AN ELECTROSTATIC OPTICAL-SYSTEM FOR ION-BEAM LITHOGRAPHY

被引：20

作者：

PAIK, H ^{[1
]}

LEWIS, GN ^{[1
]}

KIRKLAND, EJ ^{[1
]}

SIEGEL, BM ^{[1
]}

机构：

[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期

关键词：

D O I：

10.1116/1.583295

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：75 / 84

页数：10

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