FREE-ELECTRON PARAMETERS OF SPUTTERED NOBLE-METAL FILMS

被引：4
|
作者：
DRYZEK, J
CZAPLA, A
机构：
[1] Acad of Mining & Metallurgy, Dep, of Solid State Physics, Cracow, Pol, Acad of Mining & Metallurgy, Dep of Solid State Physics, Cracow, Pol
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1985年 / 4卷 / 02期
关键词：
FILMS; -; Metallic;
D O I：
10.1007/BF00728063
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The electrical and optical properties of noble metal films have been investigated by many authors. The parameters of free electrons have been determined either from electrical characteristics or from optical transmission and reflection spectra. We have shown that the Fuchs-Sondheimer theory may be applied to the simultaneous description of the optical and electrical properties. The purpose of this investigation was to obtain the free-electron parameters of sputtered noble metal films over a range of film thicknesses where the optical and conduction properties rapidly change. We investigated also the influence of sputtering technique, d. c. and r. f. , on the determined electron parameters.
引用
收藏
页码：154 / 158
页数：5
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