MOLYBDENUM DEPOSITION FROM THE DECOMPOSITION OF MOLYBDENUM HEXACARBONYL

被引：34
作者：
CHO, CC [1 ]
BERNASEK, SL [1 ]
机构：
[1] PRINCETON UNIV,DEPT CHEM,PRINCETON,NJ 08544
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 08期
关键词：
D O I：
10.1063/1.342695
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3035 / 3043
页数：9
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