REACTIVE SPUTTERED CUINSE2

被引：54

作者：

THORNTON, JA ^{[1
]}

LOMMASSON, TC ^{[1
]}

TALIEH, H ^{[1
]}

TSENG, BH ^{[1
]}

机构：

[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

SOLAR CELLS | 1988年 / 24卷 / 1-2期

关键词：

D O I：

10.1016/0379-6787(88)90030-0

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：1 / 9

页数：9

共 17 条

[1]

BURNETT AF, 1986, THESIS U ILLINOIS

[2]

DAMASKINOS S, 1987, 19TH P PHOT SPEC C N, P1299

[3]

Lommasson T.C., 1987, 19TH P IEEE PHOT SPE, P1285

[4]

LOMMASSON TC, 1987, TERNARY MULTINARY CO, P1285

[5]

Mickelsen R. A., 1982, 16TH P IEEE PHOT SPE, P781

[6]

Palatnik L. S., 1967, SOV PHYS DOKL, P503

[7]

Rocheleau R.E., 1987, 19TH P IEEE PHOT SPE, P972

[8]

STOLT L, 1985, 6TH P COMM EUR COMM, P761

[9] REACTIVE SPUTTERED COPPER INDIUM DISELENIDE FILMS FOR PHOTOVOLTAIC APPLICATIONS [J].

THORNTON, JA ;

CORNOG, DG ;

HALL, RB ;

SHEA, SP ;

MEAKIN, JD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :307-311

[10] FUNDAMENTAL PROCESSES IN SPUTTERING OF RELEVANCE TO THE FABRICATION OF THIN-FILM SOLAR-CELLS [J].

THORNTON, JA .

SOLAR CELLS, 1987, 21 :41-54

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