OXIDATION AND PROTECTION IN COPPER AND COPPER ALLOY THIN-FILMS

被引：232
作者：
LI, J [1 ]
MAYER, JW [1 ]
COLGAN, EG [1 ]
机构：
[1] IBM CORP,E FISHKILL FACIL,DIV GEN TECHNOL,HOPEWELL JUNCTION,NY 12533
来源：
JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 05期
关键词：
D O I：
10.1063/1.349344
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The oxidation kinetics of copper thin films have been studied at temperatures below 200-degrees-C in air. The protection of copper from oxidation can be achieved by alloying copper film with Ti, Pd, Cr, or Al. The influence of the composition and microstructure to the oxidation rate has been studied. The compounds Cu3Ti, Cu3Pd, and CuAl2 are stable in the oxidation ambient. The formation of Cr-oxide, which is a passive oxide, explains the inhibition of oxidation on Cu-Cr films. Compared with the crystalline phase, the amorphous Cu-65Ti35 alloy film is more oxidation resistant. A TiN layer with oxygen incorporated is more effective in preventing copper oxidation than a TiN layer without oxygen incorporated. A passivating Si3N4 layer on copper thin films can prevent copper oxidation effectively at 350-degrees-C in oxygen ambient.
引用
收藏
页码：2820 / 2827
页数：8
相关论文
共 20 条
  • [1] Granulation, Phase Change, and Microstructure - Kinetics of Phase Change. III
    Avrami, M
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1941, 9 (02) : 177 - 184
  • [2] THE USE OF THE 3.05 MEV OXYGEN RESONANCE FOR HE-4 BACKSCATTERING NEAR-SURFACE ANALYSIS OF OXYGEN-CONTAINING HIGH Z-COMPOUNDS
    BLANPAIN, B
    REVESZ, P
    DOOLITTLE, LR
    PURSER, KH
    MAYER, JW
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 34 (04) : 459 - 464
  • [3] THE OXIDATION OF METALS
    CAMPBELL, WE
    THOMAS, UB
    [J]. TRANSACTIONS OF THE ELECTROCHEMICAL SOCIETY, 1947, 91 : 623 - 640
  • [4] OXIDATION OF CU IN CONTACT WITH PREIMIDIZED POLYIMIDE
    CHAMBERS, SA
    LOEBS, VA
    CHAKRAVORTY, KK
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02): : 875 - 884
  • [5] OXIDATION STUDIES OF AMORPHOUS AND CRYSTALLINE GERMANIUM FILMS BY AUGER-SPECTROSCOPY
    FAN, JCC
    HENRICH, VE
    [J]. APPLIED PHYSICS LETTERS, 1974, 25 (07) : 401 - 403
  • [6] Frohlich K., 1936, Z METALLKD, V28, P368
  • [7] HAUFFE K, 1965, OXID MET, P161
  • [8] EFFECTS OF N2+ ION-IMPLANTATION ON THE OXIDATION OF POLYCRYSTALLINE COPPER
    KOTHARI, DC
    GUZMAN, L
    GIRARDI, S
    TOMASI, A
    GIALANELLA, S
    RAOLE, PM
    PRABHAWALKAR, PD
    [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 116 : 135 - 142
  • [9] Kubaschewski O., 1962, OXIDATION METALS ALL, P37
  • [10] THE STRUCTURE OF OXIDE FILMS ON DIFFERENT FACES OF A SINGLE CRYSTAL OF COPPER
    LAWLESS, KR
    GWATHMEY, AT
    [J]. ACTA METALLURGICA, 1956, 4 (02): : 153 - 163
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