RHEED STUDIES OF SEMICONDUCTOR GROWTH BY MBE

被引:1
|
作者
DOBSON, PJ
JOYCE, BA
NEAVE, JH
ZHANG, J
机构
[1] PHILIPS RES LABS,REDHILL RH1 5HA,SURREY,ENGLAND
[2] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,DEPT PHYS,LONDON SW7 2BZ,ENGLAND
关键词
D O I
10.1016/0042-207X(88)90095-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:422 / 423
页数:2
相关论文
共 50 条
  • [1] RHEED OSCILLATION STUDIES OF MBE GROWTH OF SILICON
    SAKAMOTO, T
    SAKAMOTO, K
    MIKI, K
    KAWAMURA, T
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1989, (100): : 99 - 108
  • [2] RHEED OSCILLATION STUDIES OF MBE GROWTH OF SILICON
    SAKAMOTO, T
    SAKAMOTO, K
    MIKI, K
    KAWAMURA, T
    MICROSCOPY OF SEMICONDUCTING MATERIALS 1989, 1989, 100 : 99 - 108
  • [3] RHEED STUDIES OF MBE GROWTH MECHANISMS OF CDTE AND CDMNTE
    WAAG, A
    BEHR, T
    LITZ, T
    KUHNHEINRICH, B
    HOMMEL, D
    LANDWEHR, G
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1993, 16 (1-3): : 103 - 107
  • [4] MODULATED MOLECULAR-BEAM AND RHEED STUDIES OF MBE AND MOMBE GROWTH
    GIBSON, EM
    FOXON, CT
    ZHANG, J
    JOYCE, BA
    JOURNAL OF CRYSTAL GROWTH, 1990, 105 (1-4) : 81 - 86
  • [5] RHEED STUDIES OF THE GROWTH OF SI(001) BY GAS SOURCE MBE FROM DISILANE
    MOKLER, SM
    LIU, WK
    OHTANI, N
    JOYCE, BA
    JOURNAL OF CRYSTAL GROWTH, 1992, 120 (1-4) : 290 - 295
  • [6] In situ studies of the MBE growth of III–V systems using RHEED and STM
    B. A. Joyce
    Journal of Materials Science: Materials in Electronics, 2003, 14 : 591 - 598
  • [7] DYNAMIC RHEED STUDIES DURING SI MBE AND ITS APPLICATIONS TO HETEROEPITAXIAL GROWTH
    SAKAMOTO, T
    SAKAMOTO, K
    HASHIGUCHI, G
    TAKAHASHI, N
    NAGAO, S
    KUNIYOSHI, K
    MIKI, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C545 - C545
  • [8] INTERPRETATION OF RHEED OSCILLATIONS DURING MBE GROWTH
    LEHMPFUHL, G
    ICHIMIYA, A
    NAKAHARA, H
    SURFACE SCIENCE, 1991, 245 (1-2) : L159 - L162
  • [9] In situ studies of the MBE growth of III-V systems using RHEED and STM
    Joyce, BA
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2003, 14 (09) : 591 - 598
  • [10] SIMULATION OF RHEED INTENSITY OSCILLATIONS DURING MBE GROWTH
    VANDERWAGT, JPA
    HARRIS, JS
    JOURNAL OF CRYSTAL GROWTH, 1993, 127 (1-4) : 1025 - 1029