COMBUSTION OF EFFLUENT GASES FROM A METAL-ORGANIC VAPOR-PHASE EPITAXY SYSTEM

被引：0

作者：

COVA, P ^{[1
]}

MASUT, RA ^{[1
]}

TRAN, CA ^{[1
]}

BENSAADA, A ^{[1
]}

CURRIE, JF ^{[1
]}

机构：

[1] UNIV MONTREAL,MONTREAL H3C 3J7,QUEBEC,CANADA

来源：

COMBUSTION SCIENCE AND TECHNOLOGY | 1994年 / 97卷 / 1-3期

基金：

加拿大自然科学与工程研究理事会;

关键词：

MOVPE; TOXIC GASES; PHOSPHINE; COMBUSTION;

D O I：

10.1080/00102209408935365

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

We study the efficiency of a novel flow-type combustion system designed to burn toxic and inflammable effluent gases from a low pressure Metal-Organic Vapor Phase Epitaxy (MOVPE) reactor. The combustion reaction of the toxic and flammable gases has been optimized. We report on the kinetics of phosphine pyrolysis and oxidation, finding that for the total gas flows introduced into the combustion chamber (10-25 SLM) the transit time (greater-than-or-equal-to 1s) does not limit the conversion efficiency. The measured reaction's activation energy is 38 (+/- 7) kcal/mole, which is higher than values which have appeared in the literature for the combustion of phosphine and comparable to the value published for the heterogeneous decomposition of this gas.

引用

页码：1 / 11

页数：11

共 7 条

[1] MASS-SPECTROMETRIC STUDIES OF TRIMETHYLINDIUM PYROLYSIS [J].