INITIAL RESULTS OF A HIGH THROUGHPUT MBE SYSTEM FOR DEVICE FABRICATION

被引：36

作者：

HWANG, JCM ^{[1
]}

BRENNAN, TM ^{[1
]}

CHO, AY ^{[1
]}

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 02期

关键词：

D O I：

10.1149/1.2119737

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：493 / 496

页数：4

共 14 条

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