HIGH COERCIVITY AND HIGH SATURATION MAGNETIZATION MN-AL THIN-FILMS

被引:8
作者
HUANG, JH
KUO, PC
SHEN, SC
机构
[1] The Institute of Materials Science and Engineering, National Taiwan University
关键词
D O I
10.1109/20.406550
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Mn-Al thin films with the composition of 31-68 at.% Mn were prepared by rf magnetron sputtering at various substrate temperature then annealing in vacuum. Effects of the chemical composition, substrate temperature and annealing temperature on the magnetic properties of Mn-Al films have been investigated. The analysis of x-ray diffraction and magnetic measurement indicate that tau-phase was synthesized at a composition range of 40-60 at.% Mn. However, the formation of large amount of tau-phase occurred at Mn-50-Al-50 films, which have a high coercivity up to about 3000 Oe and a fairly large saturation magnetization of about 420 emu/cc.
引用
收藏
页码:2494 / 2498
页数:5
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