FUNDAMENTAL PROPERTIES OF RADIOFREQUENCY AND MICROWAVE SURFACE-WAVE INDUCED PLASMAS

被引:23
|
作者
BESNER, A [1 ]
MOISAN, M [1 ]
HUBERT, J [1 ]
机构
[1] UNIV MONTREAL,DEPT CHIM,POB 6128,STN A,MONTREAL H3C 3J7,QUEBEC,CANADA
关键词
D O I
10.1039/ja9880300863
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:863 / 866
页数:4
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