PREPARATION AND CHARACTERIZATION OF RADIO-FREQUENCY-SPUTTERED BA2SI2TIO8 THIN-FILMS

Radio-frequency-sputtered barium titanium silicate (BST, Ba2Si2TiO8) thin films were grown on crystalline Si (100) substrates and were characterized using wavelength-dispersive spectrometry (WDS), X-ray diffraction (XRD), optical microscopy (OM) and scanning electron microscopy (SEM), and diagonal techniques for dielectric properties. The chemical compositions of the films increasingly deviated from stoichiometry with film thickness. At the initial stage of deposition the grain configuration is dependent on the Si substrate texture. XRD analysis indicates that the BST films deposited at an optimum substrate temperature of 845-degrees-C were strongly c-axis oriented, and that the film orientation is manipulated by substrate temperature and supersaturation. The corresponding film-growth rate in the direction normal to the film surface at 845-degrees-C was 1.95 nm min-1 at the initial stage, and decreased with sputtering time. The as-deposited films have a room-temperature bulk resistivity of 1.8 x 10(7) OMEGA m in the direction of thickness and an isotropic surface resistivity of 1.5 x 10(3) OMEGA m. The high-frequency relative dielectric constant, 0.05 at frequencies higher than 9 MHz, is lower than that of many typical piezoelectric materials. The high-frequency impedance character is typical of piezoelectric materials, giving a minimum impedance frequency of 9.0 MHz and a serial resonant frequency at about 9.5 MHz.