CHEMICAL INDUCTION EFFECTS - O-INCORPORATION IN, AND SUBSTITUTIONAL DOPING OF A-SI-H

被引：7

作者：

LUCOVSKY, G

JING, Z

WHITTEN, JL

机构：

[1] N CAROLINA STATE UNIV,DEPT CHEM,RALEIGH,NC 27695

[2] N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1991年 / 137卷

关键词：

D O I：

10.1016/S0022-3093(05)80071-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper identifies several important non-statistical bonding environments in alloyed and doped a-Si:H. These include O-Si-H linkages in a-Si,O:H alloys, and P+-Si-H and Si-B--H linkages that play a significant role in the doping processes in a-Si:H. We present the experimental evidence for these bonding arrangements, and a model that accounts for their creation during film deposition.

引用

收藏

页码：119 / 122

页数：4

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