CHEMICAL INDUCTION EFFECTS - O-INCORPORATION IN, AND SUBSTITUTIONAL DOPING OF A-SI-H

被引：7
作者：
LUCOVSKY, G
JING, Z
WHITTEN, JL
机构：
[1] N CAROLINA STATE UNIV,DEPT CHEM,RALEIGH,NC 27695
[2] N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1991年 / 137卷
关键词：
D O I：
10.1016/S0022-3093(05)80071-7
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper identifies several important non-statistical bonding environments in alloyed and doped a-Si:H. These include O-Si-H linkages in a-Si,O:H alloys, and P+-Si-H and Si-B--H linkages that play a significant role in the doping processes in a-Si:H. We present the experimental evidence for these bonding arrangements, and a model that accounts for their creation during film deposition.
引用
收藏
页码：119 / 122
页数：4
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