SURFACE-ROUGHNESS AT THE SI(100)-SIO2 INTERFACE

被引：478
|
作者：
GOODNICK, SM [1 ]
FERRY, DK [1 ]
WILMSEN, CW [1 ]
LILIENTAL, Z [1 ]
FATHY, D [1 ]
KRIVANEK, OL [1 ]
机构：
[1] ARIZONA STATE UNIV,CTR SOLID STATE SCI,TEMPE,AZ 85281
来源：
PHYSICAL REVIEW B | 1985年 / 32卷 / 12期
关键词：
D O I：
10.1103/PhysRevB.32.8171
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：8171 / 8186
页数：16
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