SURFACE-ROUGHNESS AT THE SI(100)-SIO2 INTERFACE

被引：478

作者：

GOODNICK, SM ^{[1
]}

FERRY, DK ^{[1
]}

WILMSEN, CW ^{[1
]}

LILIENTAL, Z ^{[1
]}

FATHY, D ^{[1
]}

KRIVANEK, OL ^{[1
]}

机构：

[1] ARIZONA STATE UNIV,CTR SOLID STATE SCI,TEMPE,AZ 85281

来源：

PHYSICAL REVIEW B | 1985年 / 32卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.32.8171

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：8171 / 8186

页数：16

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