SURFACE-ROUGHNESS AT THE SI(100)-SIO2 INTERFACE

被引：478

作者：

GOODNICK, SM ^{[1
]}

FERRY, DK ^{[1
]}

WILMSEN, CW ^{[1
]}

LILIENTAL, Z ^{[1
]}

FATHY, D ^{[1
]}

KRIVANEK, OL ^{[1
]}

机构：

[1] ARIZONA STATE UNIV,CTR SOLID STATE SCI,TEMPE,AZ 85281

来源：

PHYSICAL REVIEW B | 1985年 / 32卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.32.8171

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：8171 / 8186

页数：16

共 35 条

[1] STATISTICAL PREDICTOR IDENTIFICATION
AKAIKE, H
[J]. ANNALS OF THE INSTITUTE OF STATISTICAL MATHEMATICS, 1970, 22 (02) : 203 - &
[2] ANDO T, 1980, SURF SCI, V98, P327, DOI 10.1016/0039-6028(80)90513-0
[3] SCREENING EFFECT AND QUANTUM TRANSPORT IN A SILICON INVERSION LAYER IN STRONG MAGNETIC-FIELDS
ANDO, T
[J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1977, 43 (05) : 1616 - 1626
[4] Bauer R.S., 1980, PHYSICS MOS INSULATO, P221
[5] SPECTRA OF QUANTIZED SIGNALS
BENNETT, WR
[J]. BELL SYSTEM TECHNICAL JOURNAL, 1948, 27 (03): : 446 - 472
[6] THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY
BRAVMAN, JC
SINCLAIR, R
[J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01): : 53 - 61
[7] RELATIONSHIP BETWEEN MAXIMUM ENTROPY SPECTRA AND MAXIMUM LIKELIHOOD SPECTRA
BURG, JP
[J]. GEOPHYSICS, 1972, 37 (02) : 375 - &
[8] STUDIES OF THE SI-SIO2 INTERFACE BY MEV ION CHANNELING
CHEUNG, NW
FELDMAN, LC
SILVERMAN, PJ
STENSGAARD, I
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (11) : 859 - 861
[9] DESSEAUX J, 1972, PHILOS MAG, V35, P357
[10] DUDGEON DE, 1984, MULTIDIMENSIONAL DIG, P315