ANTIREFLECTION TREATMENT OF METAL-FILMS FOR OPTICAL LITHOGRAPHY

被引：0
|
作者：
KIM, MJ
PIACENTE, PA
机构：
来源：
THIN SOLID FILMS | 1984年 / 119卷 / 01期
关键词：
D O I：
10.1016/0040-6090(84)90159-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：75 / 86
页数：12
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