ANTIREFLECTION TREATMENT OF METAL-FILMS FOR OPTICAL LITHOGRAPHY

被引：0

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作者：

KIM, MJ

PIACENTE, PA

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来源：

THIN SOLID FILMS | 1984年 / 119卷 / 01期

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D O I：

10.1016/0040-6090(84)90159-7

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T [工业技术];

学科分类号：

08 ;

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页码：75 / 86

页数：12

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