STUDY OF NANOSCALE MAGNETIC-STRUCTURES FABRICATED USING ELECTRON-BEAM LITHOGRAPHY AND QUANTUM MAGNETIC DISK

被引：107
作者：
CHOU, SY
WEI, M
KRAUSS, PR
FISCHER, PB
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587642
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3695 / 3698
页数：4
相关论文
共 11 条
[1]   ELONGATED SINGLE-DOMAIN FERROMAGNETIC PARTICLES [J].
AHARONI, A .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (12) :5879-5882
[2]  
BELSER KA, 1990, Patent No. 4912585
[3]  
CHOU SM, COMMUNICATION
[4]   DOUBLE 15-NM-WIDE METAL GATES 10 NM APART AND 70 NM THICK ON GAAS [J].
CHOU, SY ;
FISCHER, PB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06) :1919-1922
[5]   OBSERVATION OF THE SWITCHING FIELDS OF INDIVIDUAL PERMALLOY PARTICLES IN NANOLITHOGRAPHIC ARRAYS VIA MAGNETIC FORCE MICROSCOPY [J].
GIBSON, GA ;
SMYTH, JF ;
SCHULTZ, S ;
KERN, DP .
IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :5187-5189
[6]   FABRICATION OF SINGLE-DOMAIN MAGNETIC PILLAR ARRAY OF 35 NM DIAMETER AND 65 GBITS/IN(2) DENSITY [J].
KRAUSS, PR ;
FISCHER, PB ;
CHOU, SY .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06) :3639-3642
[7]   RECORDING CHARACTERISTICS OF SUB-MICRON DISCRETE MAGNETIC TRACKS [J].
LAMBERT, SE ;
SANDERS, IL ;
PATLACH, AM ;
KROUNBI, MT .
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :3690-3692
[8]   BEYOND DISCRETE TRACKS - OTHER ASPECTS OF PATTERNED MEDIA [J].
LAMBERT, SE ;
SANDERS, IL ;
PATLACH, AM ;
KROUNBI, MT ;
HETZLER, SR .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) :4724-4726
[9]  
SHEW LF, 1963, IEEE T BROADCAST TEL, V9, P56
[10]   HYSTERESIS OF SUB-MICRON PERMALLOY PARTICULATE ARRAYS [J].
SMYTH, JF ;
SCHULTZ, S ;
KERN, D ;
SCHMID, H ;
YEE, D .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (08) :4237-4239
12