EXCIMER LASER ABLATION OF POLYIMIDE IN A MANUFACTURING FACILITY

被引：78

作者：

LANKARD, JR

WOLBOLD, G

机构：

[1] International Business Machines Corporation, Hopewell Junction, 12533-0999, NY

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1992年 / 54卷 / 04期

关键词：

42.60.B; 81.60.J;

D O I：

10.1007/BF00324201

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High power excimer laser ablation projection tools have been used successfully in IBM manufacturing for about four years. One hundred fifty W XeCL, 300 mJ per pulse and 500 mJ per pulse lasers, running at 500 Hz and 300 Hz, respectively, have been run successfully for over 2 billion pulses. Excimer laser projection ablation tools are very similar to photo-expose tools, and their similarities and differences are explained. The laser and its gas handling, beam delivery, beam homogenization, optics, debris, part handling, and maintenance are discussed.

引用

页码：355 / 359

页数：5

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