共 19 条
[1]
Auciello O., Plasma-Surface Interactions and Processing of Materials, Nato ASI Series E: Applied Sciences, 176, (1990)
[2]
Chapman B., Glow Discharge Processes, (1980)
[3]
Cuomo J.J., Rossnagel S.M., Kaufman H.R., Handbook of Ion Beam Processing and Technology, (1989)
[4]
Frick K., J. Vac. Sci. Technol., 21, 3, (1982)
[5]
Robinson R.S., Rossnagel S.M., J. Vac. Sci. Technol., 21, 3, (1982)
[6]
Kaufman H.R., Cuomo J.J., Harper J.M.E., J. Vac. Sci. Technol., 21, 3, (1982)
[7]
Harper J.M.E., Cuomo J.J., Kaufman H.R., J. Vac. Sci. Technol., 21, 3, (1982)
[8]
Andre V., Arefi F., Amoroux J., De Puydt Y., Bertrand P., Lorang G., Delamar M., Thin Solid Films, 181, (1989)
[9]
Sayka A., Eberhardt J.G., Solid State Technol. May 1989
[10]
Kaufman H.R.