MOLECULAR-DYNAMICS MODELING OF VAPOR-PHASE AND VERY-LOW-ENERGY ION-BEAM CRYSTAL-GROWTH PROCESSES

被引：37
作者：
DODSON, BW
机构：
[1] Semiconductor Physics Division, Sandia National Laboratories, Albuquerque, New Mexico
来源：
CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1990年 / 16卷 / 02期
关键词：
D O I：
10.1080/10408439008243747
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：115 / 130
页数：16
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