SELF-DIRECTED CONTROL OF PULSED-LASER DEPOSITION

被引：7

作者：

STARK, EF ^{[1
]}

LAUBE, SJP ^{[1
]}

机构：

[1] UNIV CINCINNATI,CINCINNATI,OH 45220

来源：

JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE | 1993年 / 2卷 / 05期

关键词：

LASER ABLATION; OBSERVER-BASED CONTROL; PULSED LASER DEPOSITION; QUALITATIVE CONTROL; QUALITATIVE PROCESS AUTOMATION; SOLID LUBRICANTS; TRIBOLOGY;

D O I：

10.1007/BF02650062

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Implementation of self-directed control of pulsed laser deposition (PLD) requires actuators, sensors, and a materials and processing knowledge base. Improvements in quality and reproducibility of material deposits are achieved by driving the process toward desired operating regions. Empirical relationships are determined experimentally to describe the complex dynamical interactions of laser parameters. Feedback control based on this description can then be implemented to reduce process disorder and effectively produce consistent coatings with desired properties.

引用

页码：721 / 726

页数：6

共 16 条

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