MOLECULAR-ORBITAL STUDIES OF POSITIVE ELECTRON RESISTS

被引：11

作者：

TADA, T ^{[1
]}

机构：

[1] VLSI TECHNOL RES ASSOC, COOPERAT LABS, KAWASAKI 213, JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 08期

关键词：

D O I：

10.1149/1.2127733

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1791 / 1797

页数：7

共 18 条

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