THE SIMULATION OF HIGH-RESOLUTION IMAGES OF AMORPHOUS THIN-FILMS

被引：37

作者：

FAN, GY

COWLEY, JM

机构：

[1] Arizona State Univ, Tempe, AZ, USA, Arizona State Univ, Tempe, AZ, USA

来源：

ULTRAMICROSCOPY | 1987年 / 21卷 / 02期

关键词：

MICROSCOPIC EXAMINATION - Thin Films - SILICON AND ALLOYS - Thin Films;

D O I：

10.1016/0304-3991(87)90079-9

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Computer-simulated high resolution electron microscopy (HREM) images of white-noise weak phase objects show features similar to those observed in images of very thin films (2 nm) of amorphous silicon. Local patches of regular fringes arise as a result of the spatial-frequency filtering effect of the aperture and need not indicate the presence of microcrystalline regions. It is shown how drastically the appearance of a simulated amorphous image is influenced by the transfer function of the objective lens and by the objective aperture or equivalent damping of high-frequency components due to partial temporal and spatial coherence of the electron beam. Simulated images of through-focus series also show the same general appearance as for an amorphous silicon film.

引用

页码：125 / 130

页数：6

共 7 条

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